A novel approach for a coordinate measuring machine probing head with a levitating probe integrating the Kibble-balance principle and a Maxwell-clamp-like mounting concept

Zhong Y, Hausotte T, Hein G, Schinn J, Rogge N, Fröhlich T (2026)


Publication Type: Conference contribution

Publication year: 2026

Publisher: euspen

Pages Range: 190-191

Conference Proceedings Title: European Society for Precision Engineering and Nanotechnology, Conference Proceedings - 26th International Conference and Exhibition, EUSPEN 2026

Event location: Krakow, POL

ISBN: 9781998999194

Abstract

In order to enable coordinate measuring machines (CMMs) to achieve measurement accuracy in the nanometre range and a higher dynamic, an innovative probing head has been developed. Conventional CMM probing heads operate either as simple through-trigger head or with elastomechanical deflections of parallel leaf-spring guides as passive system or active system, with additional electromechanical actuators. All of these systems have limitations regarding probing force calibration and metrological traceability. In this paper, a novel design of traceable, active, forceand torque-measuring CMM probing head with a levitating probe is presented. The probe and carrier plate are levitated by six voice coil actuators (VCA) in hexapod-like arrangement without any leaf-springs. This parallel kinematic is controlled in position and orientation using the measuring signals of three 2D position sensors. The arrangement allows the forces of the actuators to be calibrated according to the Kibble-balance principle. A strict separation of the force/torque and position/orientation measuring loops, as well as the special design of the connection between the two loops using a Maxwell-clamp-like mounting, enables the combination of lightweight and rigid materials for the force and torque measuring loop with materials with low thermal expansion for the position and orientation measuring loops. Subsequently, finite element simulations were performed to determine how temperature changes affect the position of the measuring result.

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APA:

Zhong, Y., Hausotte, T., Hein, G., Schinn, J., Rogge, N., & Fröhlich, T. (2026). A novel approach for a coordinate measuring machine probing head with a levitating probe integrating the Kibble-balance principle and a Maxwell-clamp-like mounting concept. In O. Riemer (Eds.), European Society for Precision Engineering and Nanotechnology, Conference Proceedings - 26th International Conference and Exhibition, EUSPEN 2026 (pp. 190-191). Krakow, POL: euspen.

MLA:

Zhong, Yujie, et al. "A novel approach for a coordinate measuring machine probing head with a levitating probe integrating the Kibble-balance principle and a Maxwell-clamp-like mounting concept." Proceedings of the 26th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2026, Krakow, POL Ed. O. Riemer, euspen, 2026. 190-191.

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