Just-in-time Scheduling of Semiconductor Manufacturing System Based on Supervisory Control of Timed Discrete-event Systems
Shi T, Wang X, Moor T, Li Z (2026)
Publication Type: Conference contribution
Publication year: 2026
Publisher: Institute of Electrical and Electronics Engineers Inc.
Pages Range: 525-530
Conference Proceedings Title: 2026 7th International Conference on Electrical Technology and Automatic Control, ICETAC 2026
Event location: Nanjing
ISBN: 9798319518255
DOI: 10.1109/ICETAC70565.2026.11636124
Abstract
Cluster tools are essential to modern semiconductor manufacturing, yet their scheduling is challenging due to tightly coupled process modules (PMs), shared resources, and stringent temporal constraints. These factors often lead to blocking, route conflicts, and inefficient equipment utilization. This paper presents a just-in-time scheduling method for cluster tools based on supervisory control of timed discrete-event systems. Each PM is modeled as a timed transition graph, and the overall system behavior is obtained through synchronous composition. Process precedence, resource capacity, wafer transfer times, and residence time constraints are incorporated as formal specifications. A supervisor dynamically evaluates executable events, disables those that may cause blocking, and selects optimal actions according to event priorities. Simulation results show that the proposed approach effectively reduces wafer residence time and improves overall scheduling efficiency. The method provides a unified framework for scheduling analysis, evaluation, and optimization of cluster tool systems.
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APA:
Shi, T., Wang, X., Moor, T., & Li, Z. (2026). Just-in-time Scheduling of Semiconductor Manufacturing System Based on Supervisory Control of Timed Discrete-event Systems. In 2026 7th International Conference on Electrical Technology and Automatic Control, ICETAC 2026 (pp. 525-530). Nanjing, CN: Institute of Electrical and Electronics Engineers Inc..
MLA:
Shi, Tao, et al. "Just-in-time Scheduling of Semiconductor Manufacturing System Based on Supervisory Control of Timed Discrete-event Systems." Proceedings of the 7th International Conference on Electrical Technology and Automatic Control, ICETAC 2026, Nanjing Institute of Electrical and Electronics Engineers Inc., 2026. 525-530.
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